Publication:
Fabrication and Electromechanical Characterization of Silicon Nanomechanical Membrane Flexure MEMS Sensor for Gas Sensing Applications
| dc.contributor.author | Tina, B.S. | |
| dc.contributor.author | Rohith, S. | |
| dc.contributor.author | Seena, V. | |
| dc.contributor.imecauthor | Tina, B. S. | |
| dc.date.accessioned | 2024-08-11T19:03:27Z | |
| dc.date.available | 2024-08-11T19:03:27Z | |
| dc.date.issued | 2024-MAR 1 | |
| dc.description.wosFundingText | No Statement Available | |
| dc.identifier.doi | 10.1109/JSEN.2024.3351198 | |
| dc.identifier.issn | 1530-437X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44300 | |
| dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | |
| dc.source.beginpage | 5440 | |
| dc.source.endpage | 5447 | |
| dc.source.issue | 5 | |
| dc.source.journal | IEEE SENSORS JOURNAL | |
| dc.source.numberofpages | 8 | |
| dc.source.volume | 24 | |
| dc.subject.keywords | VAPOR DETECTION | |
| dc.subject.keywords | HYDROGEN | |
| dc.title | Fabrication and Electromechanical Characterization of Silicon Nanomechanical Membrane Flexure MEMS Sensor for Gas Sensing Applications | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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