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Optimized ultra-low thermal budget process flow for advanced high-K / metal gate first CMOS using laser-annealing technology
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1924 since deposited on 2021-10-18
2last month
Acq. date: 2026-01-25
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Statistics
Views
1924 since deposited on 2021-10-18
2last month
Acq. date: 2026-01-25
Citations