Publication:

Transfer of a high temperature LPCVD-SiN photonic layer on wafers with thermal budget limitations

Date

2024

Proceedings Paper

https://doi.org/10.1109/OMN61224.2024.10685248

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Author(s)

;

O'Callaghan, John

;

Thanjavur Prakasam, Vittal

;

Neutens, Pieter

;

Ceuppens, Joris

;

;

;

Helin, Philippe

Journal

N/A

Statistics

128 since deposited on 2024-12-04

Acq. date: 2026-02-25