Publication:

Transfer of a high temperature LPCVD-SiN photonic layer on wafers with thermal budget limitations

Date

2024
Proceedings Paper
https://doi.org/10.1109/OMN61224.2024.10685248
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dc.contributor.authorPham, Nga
dc.contributor.authorO'Callaghan, John
dc.contributor.authorThanjavur Prakasam, Vittal
dc.contributor.authorNeutens, Pieter
dc.contributor.authorCeuppens, Joris
dc.contributor.authorVisker, Jakob
dc.contributor.authorZhou, Di
dc.contributor.authorHelin, Philippe
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.imecauthorCeuppens, Joris
dc.contributor.imecauthorZhou, Di
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorPham, Nga
dc.contributor.imecauthorO'Callaghan, John
dc.contributor.imecauthorThanjavur Prakasam, Vittal
dc.contributor.imecauthorVisker, Jakob
dc.contributor.orcidimecNeutens, Pieter::0000-0002-0620-0033
dc.contributor.orcidimecHelin, Philippe::0009-0002-8620-273X
dc.contributor.orcidimecZhou, Di::0000-0002-4537-5186
dc.contributor.orcidimecPham, Nga::0000-0002-3443-1568
dc.contributor.orcidimecO'Callaghan, John::0000-0003-2313-8697
dc.contributor.orcidimecThanjavur Prakasam, Vittal::0000-0003-0272-7468
dc.contributor.orcidimecVisker, Jakob::0009-0002-8930-0140
dc.date.accessioned2025-06-17T11:49:27Z
dc.date.available2024-12-04T17:02:33Z
dc.date.available2025-06-17T11:49:27Z
dc.date.issued2024
dc.identifier.doi10.1109/OMN61224.2024.10685248
dc.identifier.eisbn979-8-3503-8492-5
dc.identifier.issn2160-5033
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44915
dc.publisherIEEE
dc.source.conferenceInternational Conference on Optical MEMS and Nanophotonics (OMN)
dc.source.conferencedateJUL 28-AUG 01, 2024
dc.source.conferencelocationSan Sebastian
dc.source.journalN/A
dc.source.numberofpages2
dc.title

Transfer of a high temperature LPCVD-SiN photonic layer on wafers with thermal budget limitations

dc.typeProceedings paper
dspace.entity.typePublication
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