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Conference contributions
Impact of FEOL cross heating on the thermal performance of advanced BEOL
Publication:
Impact of FEOL cross heating on the thermal performance of advanced BEOL
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Date
2022
Proceedings Paper
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1.09 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lofrano, Melina
;
Vermeersch, Bjorn
;
Oprins, Herman
;
Park, Seongho
;
Tokei, Zsolt
Journal
N/A
Abstract
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925
since deposited on 2024-02-29
Acq. date: 2025-12-15
Citations
Metrics
Views
925
since deposited on 2024-02-29
Acq. date: 2025-12-15
Citations