Publication:

Impact of FEOL cross heating on the thermal performance of advanced BEOL

Date

2022
Proceedings Paper
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dc.contributor.authorLofrano, Melina
dc.contributor.authorVermeersch, Bjorn
dc.contributor.authorOprins, Herman
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorVermeersch, Bjorn
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecLofrano, Melina::0000-0002-3930-6459
dc.contributor.orcidimecVermeersch, Bjorn::0000-0001-8640-672X
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.date.accessioned2024-02-29T08:41:31Z
dc.date.available2024-02-29T08:41:31Z
dc.date.embargo9999-12-31
dc.date.issued2022
dc.identifier.isbn978-1-6654-8503-6
dc.identifier.issnN/A
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43602
dc.publisherIEEE
dc.source.beginpage864
dc.source.conference21st IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm 2022)
dc.source.conferencedateMay 31, 2022 - June 3, 2022
dc.source.conferencelocationSan Diego, CA
dc.source.endpage872
dc.source.journalN/A
dc.source.numberofpages9
dc.title

Impact of FEOL cross heating on the thermal performance of advanced BEOL

dc.typeProceedings paper
dspace.entity.typePublication
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