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Challenges in integration of metal gate high-k dielectrics gate stacks
Publication:
Challenges in integration of metal gate high-k dielectrics gate stacks
Date
2004
Proceedings Paper
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10426.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tsai, W.
;
Ragnarsson, Lars-Ake
;
Schram, Tom
;
De Gendt, Stefan
;
Heyns, Marc
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Downloads
1
since deposited on 2021-10-15
Acq. date: 2025-10-25
Views
1873
since deposited on 2021-10-15
422
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations