Publication:
Challenges in integration of metal gate high-k dielectrics gate stacks
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1 since deposited on 2021-10-15
Acq. date: 2025-12-15
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1876 since deposited on 2021-10-15
Acq. date: 2025-12-15
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1 since deposited on 2021-10-15
Acq. date: 2025-12-15
Views
1876 since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations