Publication:

Disruptive Technology Elements, and Rapid and Accurate Block-Level Performance Evaluation for 3nm and Beyond

Date

2021

Proceedings Paper

https://doi.org/10.1109/EDTM50988.2021.9420975

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Author(s)

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Sarkar, Satadru

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Zografos, Odysseas

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Spessot, Alessio

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Sisto, Giuliano

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Schuddinck, Pieter

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Hellings, Geert

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Dentoni Litta, Eugenio

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Ryckaert, Julien

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Horiguchi, Naoto

Journal

na

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1931 since deposited on 2021-11-02

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Acq. date: 2026-04-07