Publication:
Disruptive Technology Elements, and Rapid and Accurate Block-Level Performance Evaluation for 3nm and Beyond
| dc.contributor.author | Na, Myung Hee | |
| dc.contributor.author | Jang, Doyoung | |
| dc.contributor.author | Baert, Rogier | |
| dc.contributor.author | Sarkar, Satadru | |
| dc.contributor.author | Patli, Sudhir | |
| dc.contributor.author | Zografos, Odysseas | |
| dc.contributor.author | Chehab, Bilal | |
| dc.contributor.author | Spessot, Alessio | |
| dc.contributor.author | Sisto, Giuliano | |
| dc.contributor.author | Schuddinck, Pieter | |
| dc.contributor.author | Mertens, Hans | |
| dc.contributor.author | Oniki, Yusuke | |
| dc.contributor.author | Hellings, Geert | |
| dc.contributor.author | Dentoni Litta, Eugenio | |
| dc.contributor.author | Ryckaert, Julien | |
| dc.contributor.author | Horiguchi, Naoto | |
| dc.contributor.imecauthor | Na, Myung Hee | |
| dc.contributor.imecauthor | Jang, Doyoung | |
| dc.contributor.imecauthor | Baert, Rogier | |
| dc.contributor.imecauthor | Sarkar, Satadru | |
| dc.contributor.imecauthor | Patli, Sudhir | |
| dc.contributor.imecauthor | Zografos, Odysseas | |
| dc.contributor.imecauthor | Chehab, Bilal | |
| dc.contributor.imecauthor | Spessot, Alessio | |
| dc.contributor.imecauthor | Sisto, Giuliano | |
| dc.contributor.imecauthor | Schuddinck, Pieter | |
| dc.contributor.imecauthor | Mertens, Hans | |
| dc.contributor.imecauthor | Oniki, Yusuke | |
| dc.contributor.imecauthor | Hellings, Geert | |
| dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
| dc.contributor.imecauthor | Ryckaert, Julien | |
| dc.contributor.imecauthor | Horiguchi, Naoto | |
| dc.contributor.orcidext | Sisto, G.::0000-0001-8706-4311 | |
| dc.contributor.orcidimec | Zografos, Odysseas::0000-0002-9998-8009 | |
| dc.contributor.orcidimec | Oniki, Yusuke::0000-0002-6619-1327 | |
| dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
| dc.contributor.orcidimec | Dentoni Litta, Eugenio::0000-0003-0333-376X | |
| dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
| dc.date.accessioned | 2021-12-07T08:25:05Z | |
| dc.date.available | 2021-11-02T15:58:13Z | |
| dc.date.available | 2021-12-07T08:25:05Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/EDTM50988.2021.9420975 | |
| dc.identifier.eisbn | 978-1-7281-8176-9 | |
| dc.identifier.issn | na | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37667 | |
| dc.publisher | IEEE | |
| dc.source.conference | 5th IEEE Electron Devices Technology and Manufacturing Conference (EDTM) | |
| dc.source.conferencedate | APR 08-11, 2021 | |
| dc.source.conferencelocation | Chengdu | |
| dc.source.journal | na | |
| dc.source.numberofpages | 3 | |
| dc.title | Disruptive Technology Elements, and Rapid and Accurate Block-Level Performance Evaluation for 3nm and Beyond | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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