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Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors
Publication:
Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors
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Date
2014
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Buhler, Rudolf
;
Eneman, Geert
;
Favia, Paola
;
Bender, Hugo
;
Vincent, Benjamin
;
Hikavyy, Andriy
;
Loo, Roger
;
Martino, Joao
;
Claeys, Cor
;
Simoen, Eddy
;
Collaert, Nadine
;
Thean, Aaron
Journal
Physica Status Solidi C
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Views
1909
since deposited on 2021-10-22
1
last month
1
last week
Acq. date: 2025-12-11
Citations