Publication:

Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors

Date

2014
Journal article
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dc.contributor.authorBuhler, Rudolf
dc.contributor.authorEneman, Geert
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorVincent, Benjamin
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLoo, Roger
dc.contributor.authorMartino, Joao
dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.authorCollaert, Nadine
dc.contributor.authorThean, Aaron
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.accessioned2021-10-22T00:50:30Z
dc.date.available2021-10-22T00:50:30Z
dc.date.issued2014
dc.identifier.issn1610-1634
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23591
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201400021/abstract
dc.source.beginpage1578
dc.source.endpage1582
dc.source.issue11_12
dc.source.journalPhysica Status Solidi C
dc.source.volume11
dc.title

Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors

dc.typeJournal article
dspace.entity.typePublication
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