Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Presentations
Ge chemical vapor deposition on GaAs and In0.53Ga0.47As for low resistivity ohmic III-V nMOSFETs source/drain contacts
Publication:
Ge chemical vapor deposition on GaAs and In0.53Ga0.47As for low resistivity ohmic III-V nMOSFETs source/drain contacts
Date
2011
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vincent, Benjamin
;
Firrincieli, Andrea
;
Waldron, Niamh
;
Wang, W.-E.
;
Franquet, Alexis
;
Douhard, Bastien
;
Bender, Hugo
;
Vandervorst, Wilfried
;
Loo, Roger
;
Caymax, Matty
Journal
Abstract
Description
Metrics
Views
1957
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
1957
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations