Publication:

Edge trimming for surface activated dielectric bonded wafers

Date

2017

Journal article

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Author(s)

Inoue, Fumihiro

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;

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Moeller, Berthold

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Yokoyama, Yokoyama

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Phommahaxay, Alain

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Rebibis, Kenneth June

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;

;

Journal

Microelectronic Engineering

Metrics

2190 since deposited on 2021-10-24

Acq. date: 2025-12-14