Publication:

Edge trimming for surface activated dielectric bonded wafers

Date

2017

Journal article

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Author(s)

Inoue, Fumihiro

;

;

;

;

Moeller, Berthold

;

Yokoyama, Yokoyama

;

Phommahaxay, Alain

;

Rebibis, Kenneth June

;

;

;

Journal

Microelectronic Engineering

Statistics

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Acq. date: 2026-10-13