Publication:
Airgap Integration in MP18 Two-Level Semi-damascene Interconnects with Fully Self-aligned Vias
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191 since deposited on 2025-03-06
3last month
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Acq. date: 2026-01-11
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Metrics
Views
191 since deposited on 2025-03-06
3last month
1last week
Acq. date: 2026-01-11
Citations