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Influence of the strain-relaxation induced defect creation on the lekage current of embedded Si1-xGex source/drain junctions

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1974 since deposited on 2021-10-17
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Acq. date: 2026-05-18

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1974 since deposited on 2021-10-17
2last month
2last week
Acq. date: 2026-05-18

Citations