Publication:
HfO2/spacer-interface breakdown in HfO2 high-k/poly-silicon gate stacks
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2003 since deposited on 2021-10-16
3last month
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Acq. date: 2026-08-04
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Statistics
Views
2003 since deposited on 2021-10-16
3last month
2last week
Acq. date: 2026-08-04
Citations