Publication:
HfO2/spacer-interface breakdown in HfO2 high-k/poly-silicon gate stacks
Date
| dc.contributor.author | Ranjan, R | |
| dc.contributor.author | Pey, K.L. | |
| dc.contributor.author | Tung, C.H. | |
| dc.contributor.author | Tang, L.J. | |
| dc.contributor.author | Elattari, Brahim | |
| dc.contributor.author | Kauerauf, Thomas | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | Ang, D.S. | |
| dc.contributor.author | Bera, L.K. | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.date.accessioned | 2021-10-16T04:25:11Z | |
| dc.date.available | 2021-10-16T04:25:11Z | |
| dc.date.issued | 2005-06 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11084 | |
| dc.source.beginpage | 370 | |
| dc.source.endpage | 373 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.title | HfO2/spacer-interface breakdown in HfO2 high-k/poly-silicon gate stacks | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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