Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Critical material properties for pattern collapse mitigation
Publication:
Critical material properties for pattern collapse mitigation
Date
2012
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Winroth, Gustaf
;
Younkin, Todd R.
;
Blackwell, James M.
;
Gronheid, Roel
Journal
Journal of Micro/Nanolithography MEMS and MOEMS
Abstract
Description
Metrics
Views
1904
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1904
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations