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Critical material properties for pattern collapse mitigation
Publication:
Critical material properties for pattern collapse mitigation
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Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Winroth, Gustaf
;
Younkin, Todd R.
;
Blackwell, James M.
;
Gronheid, Roel
Journal
Journal of Micro/Nanolithography MEMS and MOEMS
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1907
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Acq. date: 2025-12-10
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Views
1907
since deposited on 2021-10-20
2
last month
Acq. date: 2025-12-10
Citations