Publication:
Critical material properties for pattern collapse mitigation
Date
| dc.contributor.author | Winroth, Gustaf | |
| dc.contributor.author | Younkin, Todd R. | |
| dc.contributor.author | Blackwell, James M. | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.date.accessioned | 2021-10-20T19:01:15Z | |
| dc.date.available | 2021-10-20T19:01:15Z | |
| dc.date.issued | 2012 | |
| dc.identifier.issn | 1537-1646 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21854 | |
| dc.source.beginpage | 33004 | |
| dc.source.issue | 3 | |
| dc.source.journal | Journal of Micro/Nanolithography MEMS and MOEMS | |
| dc.source.volume | 11 | |
| dc.title | Critical material properties for pattern collapse mitigation | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |