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Towards 1X DRAM: Improved leakage 0.4 nm EOT STO-based MIMcap and explanation of leakage reduction mechanism showing further potential
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1938 since deposited on 2021-10-19
Acq. date: 2026-02-26
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1938 since deposited on 2021-10-19
Acq. date: 2026-02-26
Citations