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Towards 1X DRAM: Improved leakage 0.4 nm EOT STO-based MIMcap and explanation of leakage reduction mechanism showing further potential

Date

2011
Proceedings Paper
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dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorKaczer, Ben
dc.contributor.authorWang, Wan-Chih
dc.contributor.authorKim, Min-Soo
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorOpsomer, Karl
dc.contributor.authorSchaekers, Marc
dc.contributor.authorVrancken, Christa
dc.contributor.authorGovoreanu, Bogdan
dc.contributor.authorBelmonte, Attilio
dc.contributor.authorDemeurisse, Caroline
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorAltimime, Laith
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorKittl, Jorge
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorGovoreanu, Bogdan
dc.contributor.imecauthorBelmonte, Attilio
dc.contributor.imecauthorDemeurisse, Caroline
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.accessioned2021-10-19T17:11:52Z
dc.date.available2021-10-19T17:11:52Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19554
dc.source.beginpage168
dc.source.conferenceSymposium on VLSI Technology
dc.source.conferencedate13/06/2011
dc.source.conferencelocationKyoto Japan
dc.source.endpage169
dc.title

Towards 1X DRAM: Improved leakage 0.4 nm EOT STO-based MIMcap and explanation of leakage reduction mechanism showing further potential

dc.typeProceedings paper
dspace.entity.typePublication
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