Publication:
Adhesion and collapse of extreme ultraviolet photoresists and the role of underlayers
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Acq. date: 2026-04-25
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1509 since deposited on 2022-10-29
59last month
8last week
Acq. date: 2026-04-25
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1475 since deposited on 2022-10-29
Acq. date: 2026-04-25
Citations