Publication:

Adhesion and collapse of extreme ultraviolet photoresists and the role of underlayers

Date

2022
Journal article
https://doi.org/10.1117/1.JMM.21.3.034601
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dc.contributor.authorFallica, Roberto
dc.contributor.authorChen, Steven
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorSuh, Hyo Seon
dc.contributor.imecauthorFallica, Roberto
dc.contributor.imecauthorChen, Steven
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorSuh, Hyo Seon
dc.contributor.orcidimecFallica, Roberto::0000-0003-4523-9624
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.date.accessioned2022-12-21T11:12:27Z
dc.date.available2022-10-29T02:58:13Z
dc.date.available2022-11-03T09:46:47Z
dc.date.available2022-12-21T11:12:27Z
dc.date.issued2022
dc.identifier.doi10.1117/1.JMM.21.3.034601
dc.identifier.issn1932-5150
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40630
dc.publisherSPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
dc.source.beginpage034601
dc.source.endpagena
dc.source.issue3
dc.source.journalJOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
dc.source.numberofpages9
dc.source.volume21
dc.subject.keywordsINTERFACIAL-TENSION
dc.subject.keywordsSURFACE
dc.subject.keywordsEUV
dc.subject.keywordsDEVELOPER
dc.subject.keywordsFORCES
dc.subject.keywordsENERGY
dc.title

Adhesion and collapse of extreme ultraviolet photoresists and the role of underlayers

dc.typeJournal article
dspace.entity.typePublication
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