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Using chemo-epitaxial directed self-assembly for repair and frequency multiplication of EUVL contact-hole patterns
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1934 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-15
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Metrics
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1934 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-15
Citations