Publication:

Using chemo-epitaxial directed self-assembly for repair and frequency multiplication of EUVL contact-hole patterns

Date

2014
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorSingh, Arjun
dc.contributor.authorParnell, Doni
dc.contributor.authorChan, BT
dc.contributor.authorGronheid, Roel
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-22T05:53:48Z
dc.date.available2021-10-22T05:53:48Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24533
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1857190
dc.source.beginpage90492E
dc.source.conferenceAlternative Lithographic Technologies VI
dc.source.conferencedate23/02/2014
dc.source.conferencelocationSan Jose, CA USA
dc.title

Using chemo-epitaxial directed self-assembly for repair and frequency multiplication of EUVL contact-hole patterns

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
27796.pdf
Size:
1.55 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions