Publication:

Stress measurements in semiconductor devices using nano-focused Raman spectroscopy

Date

2016

Proceedings Paper

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Author(s)

Nuytten, Thomas

;

Kosemura, Daisuke

;

Bogdanowicz, Janusz

;

Witters, Liesbeth

;

;

Hantschel, Thomas

;

Schulze, Andreas

;

;

;

De Wolf, Ingrid

;

Vandervorst, Wilfried

Metrics

1851 since deposited on 2021-10-23

Acq. date: 2025-12-11