Publication:

Stress measurements in semiconductor devices using nano-focused Raman spectroscopy

Date

2016
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorNuytten, Thomas
dc.contributor.authorKosemura, Daisuke
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorEneman, Geert
dc.contributor.authorHantschel, Thomas
dc.contributor.authorSchulze, Andreas
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-23T13:18:55Z
dc.date.available2021-10-23T13:18:55Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27085
dc.source.conference14th International Conference on Reliability and Stress-Related Phenomena in Nanoelectronics - Experiment and Simulation - IRSP
dc.source.conferencedate30/05/2016
dc.source.conferencelocationDresden Germany
dc.title

Stress measurements in semiconductor devices using nano-focused Raman spectroscopy

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions