Publication:
Integration of the 3MS low-k CVD material in a 0.18µm Cu single damascene process
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2024 since deposited on 2021-10-06
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Acq. date: 2026-08-28
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2024 since deposited on 2021-10-06
1last month
1last week
Acq. date: 2026-08-28
Citations