Publication:
Spectroellipsometric Characterization of Thin Epitaxial Si1-xGex Layers
Date
| dc.contributor.author | Libezny, Milan | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Brablec, A. | |
| dc.contributor.author | Kubena, J. | |
| dc.contributor.author | Holy, V. | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.author | Nijs, Johan | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.date.accessioned | 2021-09-29T12:43:08Z | |
| dc.date.available | 2021-09-29T12:43:08Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/231 | |
| dc.source.conference | 1st International Conference on Materials for Microelectronics; October 17-19, 1994; Barcelona, Spain. | |
| dc.title | Spectroellipsometric Characterization of Thin Epitaxial Si1-xGex Layers | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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