Publication:
Mechanism of positive-bias temperature instability in sub-1 nm TaN/HfN/HfO2 gate stack with low preexisting traps
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1955 since deposited on 2021-10-16
2last month
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Acq. date: 2026-08-10
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1955 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-08-10
Citations