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Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via options
Publication:
Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via options
Date
2024
Proceedings Paper
https://doi.org/10.1109/IITC61274.2024.10732570
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Marti, Giulio
;
Delie, Gilles
;
Murdoch, Gayle
;
Gupta, Anshul
;
Kundu, Souvik
;
Decoster, Stefan
;
Varela Pedreira, Olalla
;
Lesniewska, Alicja
;
Hermans, Yannick
;
Kenens, Bart
;
Ulu Okudur, Fulya
;
Park, Seongho
;
Tokei, Zsolt
Journal
N/A
Abstract
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166
since deposited on 2025-03-06
Acq. date: 2025-10-24
Citations
Metrics
Views
166
since deposited on 2025-03-06
Acq. date: 2025-10-24
Citations