Publication:
Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via options
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175 since deposited on 2025-03-06
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Acq. date: 2026-01-26
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Statistics
Views
175 since deposited on 2025-03-06
1last month
1last week
Acq. date: 2026-01-26
Citations