Publication:

Demonstration of recessed SiGe S/D and inserted metal gate on HfO2 for high performance pFETs

Date

2005-12
Proceedings Paper
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Author(s)

Verheyen, Peter  
;
Eneman, Geert  
;
Rooyackers, Rita
;
Loo, Roger  
;
Eeckhout, Lieve
;
Rondas, Dirk  
;
Leys, Frederik
;
Snow, Jim
;
Shamiryan, Denis
;
Demand, Marc  
;
Hoffmann, Thomas Y.
;
Goodwin, Michael
;
Fujimoto, Hiromasa
;
Ravit, Claire
;
Lee, Byeong Chan
;
Caymax, Matty  
;
De Meyer, Kristin  
;
Absil, Philippe  
;
Jurczak, Gosia  
;
Biesemans, Serge  

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