Publication:
Demonstration of recessed SiGe S/D and inserted metal gate on HfO2 for high performance pFETs
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1935 since deposited on 2021-10-16
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Acq. date: 2026-01-11
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1935 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-01-11
Citations