Work-function engineering for 32nm node pMOS devices: high-performance TaCNO-gated films

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Author(s)

O'Sullivan, Barry

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Mitsuhashi, Riichirou

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;

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Kubicek, Stefan

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Paraschiv, Vasile

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Adelmann, Christoph

;

Veloso, Anabela

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;

;

Biesemans, Serge

;

Nakabayashi, Takashi

;

;

Journal

IEEE Electron Device Letters

Metrics

1930 since deposited on 2021-10-17

Acq. date: 2025-10-23