Publication:

Work-function engineering for 32nm node pMOS devices: high-performance TaCNO-gated films

Date

2008

Journal article

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Author(s)

O'Sullivan, Barry

;

Mitsuhashi, Riichirou

;

;

;

Kubicek, Stefan

;

Paraschiv, Vasile

;

Adelmann, Christoph

;

Veloso, Anabela

;

;

;

Biesemans, Serge

;

Nakabayashi, Takashi

;

;

Journal

IEEE Electron Device Letters

Metrics

1932 since deposited on 2021-10-17

Acq. date: 2025-12-10