Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Low interfacial trap density and sub-nm equivalent oxide thickness in In0.53Ga0.47As (001) metal-oxide-semiconductor devices using molecular beam deposited HfO2/Al2O3 as gate dielectrics
Publication:
Low interfacial trap density and sub-nm equivalent oxide thickness in In0.53Ga0.47As (001) metal-oxide-semiconductor devices using molecular beam deposited HfO2/Al2O3 as gate dielectrics
Date
2011
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chu, L.K.
;
Merckling, Clement
;
Alian, AliReza
;
Dekoster, Johan
;
Kwo, J.
;
Hong, M.
;
Caymax, Matty
;
Heyns, Marc
Journal
Applied Physics Letters
Abstract
Description
Metrics
Views
1874
since deposited on 2021-10-19
417
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1874
since deposited on 2021-10-19
417
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations