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Low interfacial trap density and sub-nm equivalent oxide thickness in In0.53Ga0.47As (001) metal-oxide-semiconductor devices using molecular beam deposited HfO2/Al2O3 as gate dielectrics
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Low interfacial trap density and sub-nm equivalent oxide thickness in In0.53Ga0.47As (001) metal-oxide-semiconductor devices using molecular beam deposited HfO2/Al2O3 as gate dielectrics
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chu, L.K.
;
Merckling, Clement
;
Alian, AliReza
;
Dekoster, Johan
;
Kwo, J.
;
Hong, M.
;
Caymax, Matty
;
Heyns, Marc
Journal
Applied Physics Letters
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1878
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Acq. date: 2025-12-13
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Views
1878
since deposited on 2021-10-19
2
last month
Acq. date: 2025-12-13
Citations