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Meeting the doping challenges: the case for plasma doping
Publication:
Meeting the doping challenges: the case for plasma doping
Date
2008
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
del Agua Borniquel, Jose Ignacio
;
Poon, Tze
;
Porshnev, Pete
;
Jurczak, Gosia
;
Everaert, Jean-Luc
;
Vandervorst, Wilfried
Journal
Semiconductor Fabtech
Abstract
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1893
since deposited on 2021-10-17
Acq. date: 2025-10-26
Citations
Metrics
Views
1893
since deposited on 2021-10-17
Acq. date: 2025-10-26
Citations