Publication:

Meeting the doping challenges: the case for plasma doping

Date

2008
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authordel Agua Borniquel, Jose Ignacio
dc.contributor.authorPoon, Tze
dc.contributor.authorPorshnev, Pete
dc.contributor.authorJurczak, Gosia
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthordel Agua Borniquel, Jose Ignacio
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-17T06:51:39Z
dc.date.available2021-10-17T06:51:39Z
dc.date.issued2008
dc.identifier.issn1355-8633
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13647
dc.source.issue37
dc.source.journalSemiconductor Fabtech
dc.title

Meeting the doping challenges: the case for plasma doping

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles