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Iodine enhanced focused ion beam etching of silicon for photonic device modification and prototyping
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1944 since deposited on 2021-10-17
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Acq. date: 2025-10-24
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Views
1944 since deposited on 2021-10-17
421item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations