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Articles
Etching of tungsten via a combination of thermal oxide formation and wet-chemical oxide dissolution
Publication:
Etching of tungsten via a combination of thermal oxide formation and wet-chemical oxide dissolution
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Date
2025
Journal article
https://doi.org/10.1016/j.mee.2024.112304
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pacco, Antoine
;
Nakano, Teppei
;
Loyo Prado, Jana
;
Lai, Ju-Geng
;
Kawarazaki, Hikaru
;
Altamirano Sanchez, Efrain
Journal
MICROELECTRONIC ENGINEERING
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98
since deposited on 2025-01-16
1
last month
Acq. date: 2026-01-09
Citations
Metrics
Views
98
since deposited on 2025-01-16
1
last month
Acq. date: 2026-01-09
Citations