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Surface diffusion for defect mitigation during area-selective deposition of Ru
Publication:
Surface diffusion for defect mitigation during area-selective deposition of Ru
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Soethoudt, Job
;
Grillo, Fabio
;
Marques, Esteban
;
Van Ommen, Ruud
;
Hody, Hubert
;
Delabie, Annelies
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1987
since deposited on 2021-10-27
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Acq. date: 2025-12-15
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Metrics
Views
1987
since deposited on 2021-10-27
2
last month
1
last week
Acq. date: 2025-12-15
Citations