Publication:
Surface diffusion for defect mitigation during area-selective deposition of Ru
Date
| dc.contributor.author | Soethoudt, Job | |
| dc.contributor.author | Grillo, Fabio | |
| dc.contributor.author | Marques, Esteban | |
| dc.contributor.author | Van Ommen, Ruud | |
| dc.contributor.author | Hody, Hubert | |
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.imecauthor | Soethoudt, Job | |
| dc.contributor.imecauthor | Marques, Esteban | |
| dc.contributor.imecauthor | Hody, Hubert | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.date.accessioned | 2021-10-27T18:44:02Z | |
| dc.date.available | 2021-10-27T18:44:02Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/34041 | |
| dc.source.conference | ASD 2019 | |
| dc.source.conferencedate | 4/04/2019 | |
| dc.source.conferencelocation | Leuven Belgium | |
| dc.title | Surface diffusion for defect mitigation during area-selective deposition of Ru | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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