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Processing dependences of CHC degradation on strained-Si pMOSFETs

Date

2010
Meeting abstract
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dc.contributor.authorAmat, Esteve
dc.contributor.authorMartin Martinez, Javier
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorRodriguez, Rosana
dc.contributor.authorNafria, Montse
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVerheyen, Peter
dc.contributor.authorAymerich, Xavier
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-18T15:15:37Z
dc.date.available2021-10-18T15:15:37Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16651
dc.source.conference16th Workshop on Dielectrics in Microelectronics - WoDIM
dc.source.conferencedate28/06/2010
dc.source.conferencelocationBratislava Slovak Republic
dc.title

Processing dependences of CHC degradation on strained-Si pMOSFETs

dc.typeMeeting abstract
dspace.entity.typePublication
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