Publication:
Double patterning design split implementation and validation for the 32nm node
Date
| dc.contributor.author | Drapeau, Martin | |
| dc.contributor.author | Wiaux, Vincent | |
| dc.contributor.author | Hendrickx, Eric | |
| dc.contributor.author | Verhaegen, Staf | |
| dc.contributor.author | Machida, Takahiro | |
| dc.contributor.imecauthor | Wiaux, Vincent | |
| dc.contributor.imecauthor | Hendrickx, Eric | |
| dc.date.accessioned | 2021-10-16T15:55:56Z | |
| dc.date.available | 2021-10-16T15:55:56Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12099 | |
| dc.identifier.url | www.spie.org | |
| dc.source.beginpage | 652109 | |
| dc.source.conference | Design for Manufacturability through Design-Process Integration | |
| dc.source.conferencedate | 28/02/2007 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | Double patterning design split implementation and validation for the 32nm node | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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