Publication:

Influence of composition of SiCN as interfacial layer on plasma activated direct bonding

Date

2019
Journal article
https://doi.org/10.1149/2.0241906jss
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41817.pdf 909.32 KB

Author(s)

Inoue, Fumihiro  
;
Peng, Lan  
;
Iacovo, Serena  
;
Phommahaxay, Alain  
;
Verdonck, Patrick  
;
Meersschaut, Johan  
;
Dara, Praveen  
;
Sleeckx, Erik  
;
Miller, Andy  
;
Beyer, Gerald  
;
Beyne, Eric  

Journal

ECS Journal of Solid State Science and Technology

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2010 since deposited on 2021-10-27
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