Publication:

An integrated measurement set-up to study the impact of atmosphere on ESD in MEMS

Date

2010
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Author(s)

Sangameswaran, Sandeep
;
De Coster, Jeroen  
;
Cherman, Vladimir  
;
Linten, Dimitri  
;
Scholz, Mirko
;
Thijs, Steven  
;
De Wolf, Ingrid  
;
Groeseneken, Guido  

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1935 since deposited on 2021-10-18
Acq. date: 2026-03-17

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1935 since deposited on 2021-10-18
Acq. date: 2026-03-17

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