Publication:

An integrated measurement set-up to study the impact of atmosphere on ESD in MEMS

Date

2010
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorCherman, Vladimir
dc.contributor.authorLinten, Dimitri
dc.contributor.authorScholz, Mirko
dc.contributor.authorThijs, Steven
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorThijs, Steven
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecThijs, Steven::0000-0003-2889-8345
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-18T21:12:05Z
dc.date.available2021-10-18T21:12:05Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17935
dc.source.conferenceInternational ESD Workshop - IEW
dc.source.conferencedate10/05/2010
dc.source.conferencelocationTutzing Germany
dc.title

An integrated measurement set-up to study the impact of atmosphere on ESD in MEMS

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations