Publication:

Critical metrology for ultrathin high k dielectrics

Date

2003
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBrijs, Bert
dc.contributor.authorBender, Hugo
dc.contributor.authorConard, Thierry
dc.contributor.authorPetry, Jasmine
dc.contributor.authorRichard, Olivier
dc.contributor.authorBlasco, X.
dc.contributor.authorNafría, M.
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorRichard, Olivier
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.accessioned2021-10-15T07:25:54Z
dc.date.available2021-10-15T07:25:54Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8319
dc.source.beginpage129
dc.source.conferenceCharacterization and Metrology for ULSI Technology
dc.source.conferencedate24/03/2003
dc.source.conferencelocationAustin, TX USA
dc.source.endpage138
dc.title

Critical metrology for ultrathin high k dielectrics

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions