Publication:
Characterisation of the silicon nitride thin films deposited by plasmamagnetron
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1775 since deposited on 2021-10-17
3last month
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Acq. date: 2026-08-25
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Statistics
Views
1775 since deposited on 2021-10-17
3last month
1last week
Acq. date: 2026-08-25
Citations