Publication:
Feasability of TiSi2 and CoSi2 for sub quarter micron processes
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1939 since deposited on 2021-09-29
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Acq. date: 2026-10-07
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Statistics
Views
1939 since deposited on 2021-09-29
1last month
1last week
Acq. date: 2026-10-07
Citations