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Articles
Photoresist coating and patterning for through-silicon via technology
Publication:
Photoresist coating and patterning for through-silicon via technology
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Date
2008
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pham, Nga
;
Sabuncuoglu Tezcan, Deniz
;
Ruythooren, Wouter
;
De Moor, Piet
;
Majeed, Bivragh
;
Baert, Kris
;
Swinnen, Bart
Journal
Journal of Micromechanics and Microengineering
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1911
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Views
1911
since deposited on 2021-10-17
1
last month
1
last week
Acq. date: 2025-12-15
Citations