Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Modifications in the Si valence band after ion-beam-induced oxidation
Publication:
Modifications in the Si valence band after ion-beam-induced oxidation
Copy permalink
Date
1994
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
4.pdf
463.49 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Alay, Josep Lluis
;
Vandervorst, Wilfried
Journal
Journal of Vacuum Science and Technology A
Abstract
Description
Metrics
Views
33350
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
33350
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-11
Citations